Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU

by Aziz, Wan Nur Sabrina Wan Ahmad; Rani, Rozina Abdul; Ngadiman, Nur Lili Suraya; Ismail, Mohd Fauzi; Zoolfakar, Ahmad Sabirin
Published in JOURNAL OF POROUS MATERIALS (2024)