| Summary: | Nanograins zinc oxide (ZnO) with c-axis preferred orientation was deposited on glass substrates by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The deposition was carried out in argon and oxygen ambient at the ratio flowrates of 10 and 5 sccm respectively, with total deposition time of 1 hour. The films were grown atgrowth temperatures were specified at RT, 100, 200, 300, 400 and 500°C. The effects of the growth temperature on the ZnO structural property was investigated by x-ray diffraction (XRD). The best ZnO crystalline quality obtained at growth temperature, TG of 300°C was further characterized by field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). © (2014) Trans Tech Publications, Switzerland.
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