Influence of Pre-Sputtering Technique on Material Properties of BST Thin Films for Tunable Microwave Applications

Influence of Pre-Sputtering Technique on Material Properties of BST Thin Films for Tunable Microwave Applications

This paper focuses on the influence of pre-sputtering process on the material properties of RF sputtered Barium Strontium Titanate (BST) thin films. Ba0.5Sr0.5TiO3 thin films were synthesized on sapphire substrates via RF magnetron sputtering system for 2-, 3- and 4-hour deposition time. The samples...

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Bibliographic Details
Published in:2020 IEEE International RF and Microwave Conference, RFM 2020 - Proceeding
Main Author: Jamaluddin F.W.; Khalid M.F.A.; Zoolfakar A.S.; Mamat M.H.; Mohd Nasir N.F.
Format: Conference paper
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2020
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85101699219&doi=10.1109%2fRFM50841.2020.9344774&partnerID=40&md5=8630cc43383f0de8f8b4c58055014f5d

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85101699219&doi=10.1109%2fRFM50841.2020.9344774&partnerID=40&md5=8630cc43383f0de8f8b4c58055014f5d

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