RF characterization of Mg 0.2Zn 0.8O thin film capacitors for MMIC applications

Mg 0.2Zn 0.8O thin films are proposed as a new dielectric material for monolithic microwave integrated circuit (MMIC) to replace current dielectric materials due to its high permittivity which can lead to size reduction, in addition to being compatible with semiconductor processing. In this work, Mg...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:2011 IEEE International RF and Microwave Conference, RFM 2011 - Proceedings
المؤلف الرئيسي: 2-s2.0-84859984277
التنسيق: Conference paper
اللغة:English
منشور في: 2011
الوصول للمادة أونلاين:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84859984277&doi=10.1109%2fRFM.2011.6168781&partnerID=40&md5=b8851592d0b65d08ab0154f90adc9010