Effects of pressure dependence on nanocolumnar zinc oxide deposited by RF magnetron sputtering

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Effects of pressure dependence on nanocolumnar zinc oxide deposited by RF magnetron sputtering

Nanocolumnar zinc oxide (ZnO) was deposited on glass substrates by RF magnetron sputtering. It was performed with a ZnO target at RF power of 200 W. The deposition was carried out in argon and oxygen ambient at the ratio of 10 and 5 sccm respectively, with total deposition time of 1 hour. The growth...

書目詳細資料
發表在:	Advanced Materials Research
主要作者:	2-s2.0-84891591510
格式:	Conference paper
語言:	English
出版:	2014
在線閱讀:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891591510&doi=10.4028%2fwww.scientific.net%2fAMR.832.787&partnerID=40&md5=43713f703ba7a562de4783c9023e357c

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