Effects of pressure dependence on nanocolumnar zinc oxide deposited by RF magnetron sputtering
Nanocolumnar zinc oxide (ZnO) was deposited on glass substrates by RF magnetron sputtering. It was performed with a ZnO target at RF power of 200 W. The deposition was carried out in argon and oxygen ambient at the ratio of 10 and 5 sccm respectively, with total deposition time of 1 hour. The growth...
| 出版年: | Advanced Materials Research |
|---|---|
| 第一著者: | |
| フォーマット: | Conference paper |
| 言語: | English |
| 出版事項: |
2014
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| オンライン･アクセス: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891591510&doi=10.4028%2fwww.scientific.net%2fAMR.832.787&partnerID=40&md5=43713f703ba7a562de4783c9023e357c |