| الملخص: | Advancement to the performance of humidity sensor is an importance subject due to its diverse role in multitude of applications. The trend shows that researchers are using various approaches to tackle the performance issues of humidity sensor. This paper reviews recent progress on the improvement of titanium dioxide-based humidity sensor performance through structural modification, doping and composite effect. These three approaches have seen tremendous success in elevating the humidity sensing performance of titanium dioxide-based humidity sensor in term of higher sensitivity, shorter response/recovery time, and higher stability. The main advantages of the modified nanostructures are that they offer huge surface area which is beneficial for the adsorption of water molecules and directional pathway for the flow of charge carrier. Meanwhile, doping and formation of composite have contributed by having a positive synergistic effect in term of hydrophilicity, electrical conductivity, surface reactivity etc. In this work, efforts to improve the humidity sensing performance by various researchers working on this material are presented and discussed. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
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