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Mesh grid of SILVACO TCAD effect on net doping profile for NMOS structures

Process of developing the NMOS structure is performed in 2D SILVACO Athena and Atlas Simulation. The NMOS fabrication process steps were chosen from reference [4]. Mesh grid effect on net doping profile was obtained by varying the grid. Variation of grid was determined through observation between fi...

書誌詳細
出版年:	AIP Conference Proceedings
第一著者:	2-s2.0-70450286458
フォーマット:	Conference paper
言語:	English
出版事項:	2009
オンライン･アクセス:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450286458&doi=10.1063%2f1.3160211&partnerID=40&md5=bb28df01dd6241325f13a5bc5f696a1e

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