Mesh grid of SILVACO TCAD effect on net doping profile for NMOS structures
Process of developing the NMOS structure is performed in 2D SILVACO Athena and Atlas Simulation. The NMOS fabrication process steps were chosen from reference [4]. Mesh grid effect on net doping profile was obtained by varying the grid. Variation of grid was determined through observation between fi...
| 发表在: | AIP Conference Proceedings |
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| 主要作者: | |
| 格式: | Conference paper |
| 语言: | English |
| 出版: |
2009
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| 在线阅读: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450286458&doi=10.1063%2f1.3160211&partnerID=40&md5=bb28df01dd6241325f13a5bc5f696a1e |