PH sensing characteristics of silicon nitride thin film and silicon nitride-based ISFET sensor
The pH sensing characterizations of silicon nitride (Si3N 4) thin film, and Si3N4-based ISFET sensor were discussed in this paper. The Si3N4 thin film was fabricated with to form silicon/silicon dioxide/silicon nitride (Si/SiO 2/Si3N4) structure while Si3N 4-based ISFET was fabricated and packaged a...
| Published in: | Proceedings - 2013 IEEE 4th Control and System Graduate Research Colloquium, ICSGRC 2013 |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2013
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891095439&doi=10.1109%2fICSGRC.2013.6653290&partnerID=40&md5=db57d04a817d7fc9a2f09fc38497827d |