Design and Simulation of Micro-Electro-Mechanical Systems (MEMS) Capacitive Pressure Sensor for Thermal Runaway Detection in the Electric Vehicle

by M Hajizi H.M.; Aris H.; Norhaimi W.M.W.; Nor N.I.M.; Sauli Z.; Aziz A.A.
Published in International Journal of Nanoelectronics and Materials (2023)

Design and Simulation of Micro-Electro-Mechanical Systems (MEMS) Capacitive Pressure Sensor for Thermal Runaway Detection in the Electric Vehicle

by Hajizi, H. M. M.; Aris, H.; Norhaimi, W. M. W.; Nor, N. I. M.; Sauli, Z.; Aziz, A. A.
Published in INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS (2023)