Boron doped amorphous carbon on n-type silicon with low negative bias by using palm oil precursor

by Ishak A.; Affendi I.H.; Ahmed Azhar N.E.; Saurdi I.; Abdullah M.H.; Malek M.F.; Rusop M.
Published in ISTMET 2014 - 1st International Symposium on Technology Management and Emerging Technologies, Proceedings (2014)