Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature ran...
| Published in: | Materials Research Innovations |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2009
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-70149090204&doi=10.1179%2f143307509X437608&partnerID=40&md5=1df3394b71c2016b6c6cae9377e80bea |