Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature ran...
| 发表在: | Materials Research Innovations |
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| 主要作者: | |
| 格式: | Conference paper |
| 语言: | English |
| 出版: |
2009
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| 在线阅读: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-70149090204&doi=10.1179%2f143307509X437608&partnerID=40&md5=1df3394b71c2016b6c6cae9377e80bea |
| 总结: | Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature range in Ar flow rate of 0.4 L min-1, ZnO nanoflower was formed. © W. S. Maney & Son Ltd. 2009. |
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| ISSN: | 14328917 |
| DOI: | 10.1179/143307509X437608 |