Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method

Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method

Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature ran...

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Published in:Materials Research Innovations
Main Author: Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
Format: Conference paper
Language:English
Published: 2009
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-70149090204&doi=10.1179%2f143307509X437608&partnerID=40&md5=1df3394b71c2016b6c6cae9377e80bea
id 2-s2.0-70149090204
spelling 2-s2.0-70149090204
Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
2009
Materials Research Innovations
13
3
10.1179/143307509X437608
https://www.scopus.com/inward/record.uri?eid=2-s2.0-70149090204&doi=10.1179%2f143307509X437608&partnerID=40&md5=1df3394b71c2016b6c6cae9377e80bea
Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature range in Ar flow rate of 0.4 L min-1, ZnO nanoflower was formed. © W. S. Maney & Son Ltd. 2009.

14328917
English
Conference paper
author Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
spellingShingle Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
author_facet Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
author_sort Khusaimi Z.; Ghani N.A.; Noor F.W.M.; Amizam S.; Rafaie H.A.; Mamat M.H.; Sahdan M.Z.; Abdullah N.; Abdullah S.; Rusop M.
title Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
title_short Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
title_full Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
title_fullStr Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
title_full_unstemmed Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
title_sort Surface morphology study on effect of deposition temperature on nanostructured zinc oxide by chemical vapour deposition method
publishDate 2009
container_title Materials Research Innovations
container_volume 13
container_issue 3
doi_str_mv 10.1179/143307509X437608
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-70149090204&doi=10.1179%2f143307509X437608&partnerID=40&md5=1df3394b71c2016b6c6cae9377e80bea
description Nanocrystalline ZnO was grown on Si and porous Si substrates, by chemical vapour deposition without metal catalyst. Increasing deposition temperature from 400 to 450°C at 0.5 L min-1 Ar flow rate, exhibited an improvement in the spread of ZnO, and smaller clusters of ZnO. At the same temperature range in Ar flow rate of 0.4 L min-1, ZnO nanoflower was formed. © W. S. Maney & Son Ltd. 2009.
publisher
issn 14328917
language English
format Conference paper
accesstype
record_format scopus
collection Scopus
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