Characterization of MgZnO thin film for 1 GHz MMIC applications
MgZnO thin films are proposed as a new dielectric material for 1 GHz monolithic microwave integrated circuit (MMIC) applications. The high permittivity of this material enables size reduction; furthermore this can be fabricated using a low cost processing method. In this work, MgZnO/Pt/Si thin films...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891595931&doi=10.4028%2fwww.scientific.net%2fAMR.832.310&partnerID=40&md5=1cc041eb3713cb55b9acc8cb08ea9497 |