Effects of oxygen gas composition on nanocolumnar zinc oxide properties deposited by RF magnetron sputtering
Nanocolumnar ZnO was successfully deposited on glass substrate by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The growth temperature was specified at 500°C, with total deposition time of 1 hour. The effects of oxygen gas composition during sp...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891596238&doi=10.4028%2fwww.scientific.net%2fAMR.832.783&partnerID=40&md5=4179f5d28910d7f583cb4f65351f1252 |