Effects of oxygen gas composition on nanocolumnar zinc oxide properties deposited by RF magnetron sputtering
Nanocolumnar ZnO was successfully deposited on glass substrate by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The growth temperature was specified at 500°C, with total deposition time of 1 hour. The effects of oxygen gas composition during sp...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891596238&doi=10.4028%2fwww.scientific.net%2fAMR.832.783&partnerID=40&md5=4179f5d28910d7f583cb4f65351f1252 |
| Summary: | Nanocolumnar ZnO was successfully deposited on glass substrate by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The growth temperature was specified at 500°C, with total deposition time of 1 hour. The effects of oxygen gas composition during sputtering process were investigated. Argon to oxygen ratio was varied at Ar10:Ox5, Ar8:Ox7 and Ar5:x10 sccm. Optical characterization on samples indicated that the transmittance though visible range is higher than 80%. Based on morphological property obtained, higher oxygen content exhibited better uniformity and surface roughness. This is due to the reduction of oxygen vacancies in the ZnO layer. © (2014) Trans Tech Publications, Switzerland. |
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| ISSN: | 10226680 |
| DOI: | 10.4028/www.scientific.net/AMR.832.783 |