Effects of oxygen gas composition on nanocolumnar zinc oxide properties deposited by RF magnetron sputtering

• Published in: Advanced Materials Research
• Main Author: Ameera N.; Shuhaimi A.; Najwa S.; Hakim K.M.; Mazwan M.; Sobri M.; Mamat M.H.; Musa M.Z.; Rusop M.
• Format: Conference paper
• Language: English
• Published: 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891596238&doi=10.4028%2fwww.scientific.net%2fAMR.832.783&partnerID=40&md5=4179f5d28910d7f583cb4f65351f1252

Nanocolumnar ZnO was successfully deposited on glass substrate by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The growth temperature was specified at 500°C, with total deposition time of 1 hour. The effects of oxygen gas composition during sputtering process were investigated. Argon to oxygen ratio was varied at Ar10:Ox5, Ar8:Ox7 and Ar5:x10 sccm. Optical characterization on samples indicated that the transmittance though visible range is higher than 80%. Based on morphological property obtained, higher oxygen content exhibited better uniformity and surface roughness. This is due to the reduction of oxygen vacancies in the ZnO layer. © (2014) Trans Tech Publications, Switzerland.