Effects of oxygen gas composition on nanocolumnar zinc oxide properties deposited by RF magnetron sputtering

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Effects of oxygen gas composition on nanocolumnar zinc oxide properties deposited by RF magnetron sputtering

Nanocolumnar ZnO was successfully deposited on glass substrate by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The growth temperature was specified at 500°C, with total deposition time of 1 hour. The effects of oxygen gas composition during sp...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Ameera N.; Shuhaimi A.; Najwa S.; Hakim K.M.; Mazwan M.; Sobri M.; Mamat M.H.; Musa M.Z.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2014
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891596238&doi=10.4028%2fwww.scientific.net%2fAMR.832.783&partnerID=40&md5=4179f5d28910d7f583cb4f65351f1252

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