A simulation based study on C-V characteristics of oxide thickness for NMOS
This paper report the Capacitance-Voltage (C-V) characterization of gate oxide in the ±10 nm thickness range. The project being done by using SILVACO TCAD software of using ATHENA and ATLAS simulator in order to fabricate the NMOS. To determine the gate oxide thickness, temperature, Asid Hydrocloric...
| Published in: | 2010 International Conference on Electronic Devices, Systems and Applications, ICEDSA 2010 - Proceedings |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2010
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955286329&doi=10.1109%2fICEDSA.2010.5503030&partnerID=40&md5=a00d85f008b0014dc8d2a795210b979e |